Transmission Electron Microscopy(TEM) - iST-Integrated Service Technology

TEM (Transmission Electron Microscopy) is an analysis device for observation the micro structure of material and lattice defects. By imaging ultra-thin sample with high-energy electron beams, its resolution is down to 0.1nm (the scale of atom).

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Pinpoint Leakage Current Point of MIM Capacitor in Five Steps
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TEM Applications for III-V Materials Analysis

What iST can do for you?

TEM is capable of analysis of fine structures, crystalline defects, and chemical compositions of materials, which is also equipped with EDS, HAADF (ZC), and stress analysis, which can acquire structural and compositional information on atomic scales to address various process issues for the clients.

The Superiority of iST

Market-leading TEM analysis technique has hit the 2nm technology node.

Fast delivery: operating 24 hours a day by 2 shifts.

The cutting-edge TEM equipment of FEI, JEOL for your selection.

The power of TEM sample preparations: iST installs Thermo Fisher Scientific (FEI) Helios Dual-beam FIB, which is the advanced model in industry and dedicated to working with the new ion polishing tool that can effectively eliminate sample damage (with energy of ion beam as low as 500 V), which can produce TEM images of high quality.