The Optical Beam Induced Resistance Change (OBIRCH) scans an IC surface (either front or back) with a laser beam during the IC function test period. OBIRCH employs a laser beam to scan IC internal connection locations to generate a temperature gradient which then leads to resistance variance. It then identifies IC flaws by matching resistance variances.
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IC Front-side OBIRCH hot spot
IC Back-side OBIRCH hot spot
- Metal/ Poly/ Well short
- Gate oxide pin hole
- Metal via hole/ Contact resistance failed
- Any IC failure (short/ bridge/ leakage/ high resistance associated with a differential material or its thickness.
Products with unstable output current are not suitable for OBIRCH detection.
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