The Emission Microscope (EMMI) is a tool for failure analysis positioning. EMMI consists of a highly-sensitive CCD capable of detecting photons emitted when the electron/electric-hole pair reunites in the device, a faint light of a wavelength between 350 nm ~ 1100 nm, the range equivalent to visible and IR light.
Find hot spots by EMMI
Conditions where hot spots are detected:
- Defects that cause hot spots
- Junction Leakage
- Contact spiking
- Hot electrons
- Gate oxide defects / Leakage(F-N current)
- Poly-silicon filaments
- Substrate damage
- Mechanical damage
- Junction Avalanche
- Hot spots that existed originally
- Saturated/ Active bipolar transistors
- Saturated MOS/ Dynamic CMOS
- Forward biased diodes /Reverse biased diodes(breakdown)
Conditions where hot spots cannot be detected:
- Defects without light spots
- Ohmic short and Metal short
- Hot spots being blocked
- Buried Junctions
- Buried Junctions and Leakage sites under metals.
Limited by lens rotation angles, a maximum of 4 probe manipulators (4 probe tips) can be installed on the stage. Maximum height of sample: 10 cm. Requires totally-dark-chamber operation without the existence of light emitting devices.