Auger Electron Spectroscopy (AES) is a highly sensitive surface analysis technique which employs an electron-beam-based excitation source and features a detection depth down to 10nm.
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AES features nano-grade single spot and ultra-surface (<10nm) analysis capacity combining with built-in Ion gun etching (Ar) to identify distribution ratio of elements at layers of different depths.
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Specific small area analysis on Au pad
Element At% distribution analysis
- Survey of the sample surface.
- Auger depth profile (etch sample surface with Ar+(3kV 1uA) for depth profiling).
- Auger mapping (element distribution mapping within a specified area).
Applicable to the study of electrical engineering, mechanical engineering, material, chemical, chemical engineering and so on.
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