Electron Energy Loss Spectroscopy (EELS) is an alternative compositional analysis technique for TEM, besides Energy Dispersive X-ray Spectroscopy (EDS). Through the interaction of high-energy electrons with the sample, EELS offers an energy resolution better than 1 eV, high sensitivity for low atomic number elements, and information of chemical and crystallographic .
How Can iST Help You?
EELS (Electron Energy Loss Spectroscopy) in TEM offers some advantages in composition analyses, including high spatial resolution, high energy resolution, and high sensitivity for light element analysis. Compared to EDS, it provides not only chemical but also crystallographic information, serving as a key tool for advanced materials analysis in the fields of semiconductors, nanomaterials, and energy applications.
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Silicon in semiconductor devices commonly exists in various chemical states, and EELS can distinguish their distribution in component structures by mapping.
DualEELS technology enables EELS to acquire signals of of low-loss and core-loss simultaneously. This enhances the efficiency of multi-element analysis of large energy loss range.
EDS provides only elemental composition, whereas EELS can reveal the oxidation state and structure of copper by analyzing the intensity ratio of the Cu L₃ and L₂ edges.
EFTEM uses an energy filter to select electrons with specific energy losses for imaging, highlighting compositional variations in different layers of a material. This technique can be performed in both the low loss region and the core loss region, depending on what kind of material information required and material systems analyzed.
- Semiconductor Industry
- LED Industry
- Optoelectronics Industry
- Micro-Electro-Mechanical Systems (MEMS) Industry
- Energy Materials Industry
- Semiconductors: IC Manufacturing Process, Advanced Packageing
- Lithium batteries
- Metals & Alloys: copper, iron, aluminum, nickel metals, High-entropy Alloy, etc.
- Ceramics: ITO, alumina (Al₂O₃), zirconia (ZrO₂), SiC, WC, etc.
- Thin Films: crystalline coatings
Gatan GIF Model 1065 Continuum ER
| Spectral rate, max. (sps) | 8000 |
| Sensor size (pixel x pixel) | 2048 x 2048 |
| Energy resolution | <1.0 eV |
| Energy range (eV) | 3000 |
Contact Window | Mr. Chen/Darry | Tel:+886-3-5799909#6169 | Email:tem_tw@istgroup.com