White light interferometry (WLI) is one of the Optical Profiler (OP) with a non-contact 3D optical method. This technology employs low coherence characteristics of white light to generate interference waves by reflecting light from objects and reference surfaces through a beam splitter which, in turn, is used to get the surface profile based on the optical path difference.
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Bruker Contour GT-K Elite
- Model:Bruker Contour GT-K Elite
- Sample size: W200mm x L200mm x H50 mm (8”wafer Compatible)
- Maximum weight:4.5kg (10 lbs.)
- Depth measurement range:Max. 9mm
- Nanoscale depth solution:~0.1nm
- Maximum analysis scope:2.3*1.7mm2(single image)
- Thick/thin film(measurable thickness):<=2μm(specific material) ; >2μm (known material refractive index needed)
- Automatic stitching function to create a large composite image
- Wafer measurement of semiconductor industry.
- MEMS、IC Packaging、measurement of precision machinery components.
- Size measurement of displayer、solar energy and LED industry.
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