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Atomic Force Microscopy (AFM)

Atomic Force Microscopy (AFM) gives atom-scale resolution, forming a key means for studying surface of micro structures. The main principle of AFM is to cause a micro displacement of the cantilever (which carries the probe) using the atomic forces between the probe tip and the specimen, to map the topography of the specimen. AFM is applicable to various material surface inspections.

The Superiority of iST AFM
     A 12" wafer containable AFM machine unique within Taiwan and mainland industry. This enables analysis without breaking the wafer and maintains its completeness for later tests.
     The extra microscope with additional functions enables a still wider scope of analysis applications, i.e., CAFM (Conductive Atomic Force Microscopy) and SCM (Scanning Capacitance Microscopy).

AFM Services:
     Membrane roughness tests
     Structural study of micro surfaces
     2D/3D material surface topography
     Nanoscale step height analysis

Compare AFM, CAFM and SCM
Analysis mechanism AFM probe CAFM probe SCM probe
Measure the surface structure and looks by atomic forces between the probe tip and specimen The probe applies voltage on its tip or specimen to get the current strength at the specimen surface Get the differential of capacitance signals with a conductive probe, convert them into 2D doping image distribution
Analysis application 1. Material surface roughness measurement and structure observation
2. Material surface 2D/3D pattern image
3. Nanoscale depth analysis and dimensioning
1. Detect over resistance or current leakage
2. Identify P+/ N+ /Poly contact
3. Measure single point I-V curve
P-N type zone and border
Machine specification Specimen dimension: (mm) 200 x 200 x 15
300 mm x 300 mm (12" wafer) Compatible
Analysis scope (um): 90 x 90 x 5
Magnification ratio: 107~1011
Bias voltage range: -10V~10V
Plane resolution: 20nm
Doping concentration range: 1015~1019 atom/cm3
Scanning range: 90 * 90um / with height in 2cm

AFM Machine Model
Bruker Dimension Icon

AFM - Roughness Analysis
Get SAD percentage, Rq and Ra values based on 2D and 3D surface roughness analysis chart

SCM Analysis - Top View Survey
Surface looks of post-AFM analysis
Determine the P/N well location by SCM

SCM Analysis - Cross Section Survey
Determine the N Well/ P Well /N Epi layer location by SCM

CAFM Analysis - AFM Surface and Contact Analysis
(Left) Contact VC with positive voltage (+1v) applied (no hot spot occurs)
(Right) Contact VC with negative voltage (-1v) applied (hot spot occurs)
Please contact nearest location for inquiries :
USA Taiwan ─ Hsinchu China ─ Shanghai Kunshan Beijing Shenzhen Japan
Other services you may be interested in:
Secondary Ion Mass Spectrometry(SIMS)
Thermal Mechanical Analyzer (TMA)
Auger Electron Spectroscopy(AES)
Scanning Electron Microscope (SEM)

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