Detecting crystal structure stacking shall damage samples under test, is there any non-destructive and easy alternative? The new XRD analysis tool is good..
the indispensable P/N doping concentration profile identify tool-the secondary ion mass spectrum analysis technique-with each wafer/LED process engineer.
For best P/N identification, it is recommended to obtain its width and depth based on a clear SEM image and identify the position with colors by SCM…