Date：2022/7/18-20
Place：Marina Bay Sands, Singapore
IPFA(International symposium on the physical & failure analysis of integrated circuits) is a global conference on the physical & failure analysis of integrated circuits.
iST will give an oral presentation on TEM analysis. We characterized one of oxide products on GaN/AlGaN epitaxial layers after thermal annealing to be beta-Ga2O3, an oxide crystal considered to be the fourth kind of semiconductor following GaN and SiC, by adequate TEM/STEM imaging techniques, electron diffractions, and EDS analysis. We collaborated with Dr. Lai in NCKU on this research work .
Information of iST’s paper:
- Speaker : Dr. Jong-Shing Bow
- In-Person Conference : 18th – 20th July, 2022
- Venue：Marina Bay Sands, Singapore
- Virtual Conference : 3rd August – 2nd September 2022 (Whova)
For more information, please visit the tutorials webpage of IPFA: https://www.ipfa-ieee.org/2022/